High-temperature perfluoroelastomer seals
Extreme temperature resistance / Chemical inertness / Plasma resistance / Low outgassing / Long service life / Certified compliance
Product Overview
High-temperature FFKM seals utilize perfluoroelastomer materials, delivering exceptional resistance to heat, chemicals, and plasma. Engineered for extreme conditions in semiconductor manufacturing, chemical processing, and aerospace, they maintain superior sealing performance in corrosive media and high-temperature environments, making them the ideal choice for high-end equipment sealing.
Key Features
Operating temperature up to 300°C; withstands short-term exposure to 327°C
Resists 1600+ chemicals, including strong acids, strong bases, and organic solvents.
Plasma environment for semiconductor etching processes
Extremely low outgassing rate in vacuum; meets high cleanliness requirements.
Service life under high-temperature conditions is 3 to 5 times that of FKM.
FDA, USP Class VI, and SEMI certified
Technical Specifications
| Parameter Item | Specification Value |
|---|---|
| Material Grade | FFKM (Perfluoroelastomer) |
| Operating Temperature | -20°C to +300°C (long-term), +327°C (short-term) |
| work stress | Vacuum to 20 MPa |
| Chemical Resistant | 1600+ chemicals, including concentrated sulfuric acid, hydrofluoric acid, and acetone |
| Hardness | Shore A 75-90 |
| Tensile Strength | ≥10 MPa |
| Elongation at Break | ≥100% |
| Compression Set | ≤25% (200°C × 24h) |
| degassing rate | TML ≤ 1.0%, CVCM ≤ 0.1% (ASTM E595) |
| Cleanliness | Class 100 cleanroom production, particles ≤ 0.5 μm |
| Color | Black, Brown, White (depending on grade) |
| Execution Standard | SEMI F57, FDA 21 CFR 177.2600, USP Class VI |